Table 4.

Comparison of CMOS capacitive biosensors.

Power	Chip Area (μm2)	The Number of Arrays	Voltage Output Type	Capacitance Resolution (aF)	Sensitivity	IDR of ΔC (fF)	Supply Voltage (V)	Tech.	Principle	Ref.
29 μW	105	16 × 16	Analog	450 aF	55 mV/fF	0.45 −57	-	0.25 μm	1 ChR (2 ChS)	[20]
-	-	320 × 320	Analog	21 aF	345 mV/fF	-	-	0.35 μm	ChR (3 CSA)	[15]
8 mW	3.6 × 105	4 × 4	Digital	17.5 aF	590 kHz/fF	12 fF	3.3	0.35 μm	4 C2F (5 RO)	[23]
84 mW	6 × 106		Digital	0.065 aF	32	<1	3.3	0.35 μm	Lock-in	[43]
-	6.272 × 105	4	Analog	10	1 V/fF	2	5	0.8 μm	6 CBCM	[61]
-	2 × 106	3	Digital	10	255 mV/fF	~2.7	1.8	0.18 μm	CBCM	[62]
8 3.06 × 10−3 μW (core) (at 1 kHz) 1.65 × 102 μW (Buffer amplifier)	7 1.45 × 102	6 × 6	Analog	15	200 mV/fF	25	±3	0.5 μm	CBCM	[64]
580 (at 150 kHz)	104	1	Digital	10	350 mV/fF	10	±3.3	0.35 μm	CBCM	[65]
910 pJ/cycle at (1 kHz)	4.3 × 104	1	Analog	-	23.4 mV/pF	-	-	0.35 μm	CBCM	[74]
1.5 × 104 μW (for 1–70 MHz)	2.5 × 1012	256 × 256	Digital	1	-	<1.8	1.2	90 nm	CBCM	[73]
103 μW (for 35 fF at 100 kHz)	6.45 × 104	1	Digital	9 873, 10 10	138 pulses/fF	~70	1.8	0.18 μm	CBCM	This work

¹ Charge redistribution, ² Charge sharing, ³ Charge sensitive amplifier, ⁴ Capacitance-to-frequency converter, ⁵ Ring oscillator, ⁶ Charge-based capacitance measurement. ⁷ This is the area of only one sensor pixel without electrodes and sensor evaluation modules. ⁸ Total power consumption is not reported, ⁹ Without pre-distortion, ¹⁰ With pre-distortion.