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. 2018 Oct 18;11(10):2022. doi: 10.3390/ma11102022

Figure 5.

Figure 5

Microscope images (832×) of Si-face SiC processed by the designed comparative experiments: (a) conventional lapping; (b) conventional CMP after conventional lapping(C-c); (c) ultrasonic CMP after conventional lapping (C-u); (d) ultrasonic lapping; (e) conventional CMP after ultrasonic lapping (U-c); (f) ultrasonic CMP after ultrasonic lapping (U-u).