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. 2018 Nov 2;8:16282. doi: 10.1038/s41598-018-34644-9

Figure 1.

Figure 1

Various SU-8 samples patterned on to heating chip. (A) Optical micrograph of a SU-8 fiber patterned across three imaging windows. TEM images of (B) freestanding cantilever-like structure obtained by plasma etch of a fiber (Inset: highlighted tip region), (C) edge of a fiber, and (D) thin-film region at the edge of an imaging window. Scale bars: A: 10 µm, B: 200 nm, C: 10 nm, D: 5 nm.