Fig. 2.
Design and manufactured metalens array. a Scheme of one unit element of a metalens. b, c Calculated intensity transmittance and phase shifts of a simple periodic array of these unit elements for linearly x-polarized incident light under normal incidence. The white circle at (Dx = 1350 nm, Dy = 480 nm) highlights the structural parameters used for the metalenses for circular polarization of light in our work. d Optical micrograph of a fabricated metalens array. Scale bar: 50 μm. The white rectangle indicates one pixel or one sub-array of the array. Each pixel is composed of six different metalenses. e Corresponding magnified electron micrograph. Scale bar: 5 μm. f, g Oblique-view and further magnified views onto selected parts of the metalenses, showing the individual high-quality silicon elliptical pillars (compare panel a). Scale bar: 500 nm