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. 2018 Oct 10;9(10):511. doi: 10.3390/mi9100511

Table 1.

Simulation parameters of the dual-mass MEMS gyroscope.

Parameter Values Units
Drive mode resonant frequency (ωx) 3925.29 × 2π rad/s
Drive mode quality factor (Qx) 4673
Sense mode resonant frequency (ωy) 3978.45×2 π rad/s
Sense mode quality factor (Qy) 449
Drive effective mass (mx) 1.42×10-6 kg
Sense effective mass (my) 1.58×10-6 kg
Drive mode capacitance (Cd) 2.88 pF
Sense mode capacitance (Cd) 4.68 pF
Quadrature correction comb number (nq) 30
Quadrature correction comb thickness (hq) 60 um
Quadrature correction comb gap (dq) 5 um
Comb overlap length (lq) 10 um
Unequal spacing ratio (λ) 2.5
Vacuum permittivity (ε0) 8.85×10-12 F/m
Tuning comb number (nt) 300
Tuning comb number thickness (ht) 60 um
Correction comb gap (dt) 4 um
Comb overlap length (lt) 200 um
Low-frequency signal amplitude (At) 1
Input signal frequency (ωt) 2π×80 rad/s
DC benchmark voltage (Vd) 2.048 V
Interface circuit amplification factor (Kpre) 7.6159×107
Controller parameters (Kp) 30
Controller parameters (Ki) 0.0075
Reference voltage (Vref) 0.2587 mV