Drive mode resonant frequency () |
3925.29 × 2
|
rad/s |
Drive mode quality factor () |
4673 |
|
Sense mode resonant frequency () |
|
rad/s |
Sense mode quality factor () |
449 |
|
Drive effective mass () |
|
kg |
Sense effective mass () |
|
kg |
Drive mode capacitance () |
2.88 |
pF |
Sense mode capacitance () |
4.68 |
pF |
Quadrature correction comb number () |
30 |
|
Quadrature correction comb thickness () |
60 |
um |
Quadrature correction comb gap () |
5 |
um |
Comb overlap length () |
10 |
um |
Unequal spacing ratio () |
2.5 |
|
Vacuum permittivity () |
|
F/m |
Tuning comb number () |
300 |
|
Tuning comb number thickness () |
60 |
um |
Correction comb gap () |
4 |
um |
Comb overlap length () |
200 |
um |
Low-frequency signal amplitude () |
1 |
|
Input signal frequency () |
|
rad/s |
DC benchmark voltage () |
2.048 |
V |
Interface circuit amplification factor () |
|
|
Controller parameters () |
30 |
|
Controller parameters () |
0.0075 |
|
Reference voltage () |
0.2587 |
mV |