Table 1.

Simulation parameters of the dual-mass MEMS gyroscope.

Parameter	Values	Units
Drive mode resonant frequency (${\omega }_x$)	3925.29 × 2$\pi$	rad/s
Drive mode quality factor ($Q_x$)	4673
Sense mode resonant frequency (${\omega }_y$)	$3978.45\times 2$ $\pi$	rad/s
Sense mode quality factor ($Q_y$)	449
Drive effective mass ($m_x$)	$1.42\times {10}^{-6}$	kg
Sense effective mass ($m_y$)	$1.58\times {10}^{-6}$	kg
Drive mode capacitance ($C_d$)	2.88	pF
Sense mode capacitance ($C_d$)	4.68	pF
Quadrature correction comb number ($n_q$)	30
Quadrature correction comb thickness ($h_q$)	60	um
Quadrature correction comb gap ($d_q$)	5	um
Comb overlap length ($l_q$)	10	um
Unequal spacing ratio ($\lambda$)	2.5
Vacuum permittivity (${\epsilon }_0$)	$8.85\times {10}^{-12}$	F/m
Tuning comb number ($n_t$)	300
Tuning comb number thickness ($h_t$)	60	um
Correction comb gap ($d_t$)	4	um
Comb overlap length ($l_t$)	200	um
Low-frequency signal amplitude ($A_t$)	1
Input signal frequency (${\omega }_t$)	$2\pi \times 80$	rad/s
DC benchmark voltage ($V_d$)	2.048	V
Interface circuit amplification factor ($K_{pre}$)	$7.6159\times {10}^7$
Controller parameters ($K_p$)	30
Controller parameters ($K_i$)	0.0075
Reference voltage ($V_{ref}$)	0.2587	mV