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Film bulk acoustic resonator (FBAR) biosensor based on inclined c-axis aluminum nitride (AlN) film for the hemostatic tests: (a) the schematic illustration of the FBAR biosensor; (b) the micrograph of the fabricated device; (c) the piece including the test pool and the FBAR sensor; (d) the picture of the printed circuit board (PCB) assembled with FBAR biosensor.
