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. 2018 Sep 30;9(10):501. doi: 10.3390/mi9100501

Figure 5.

Figure 5

Admittance curves of the FBAR based on c-axis inclined AlN film measured in air. (a) The admittance curve of the bare device without polyethylene layer in a wide frequency range; (b) The detailed curves near the shear resonance before and after coating; (c) The detailed curves near the longitudinal resonance before and after coating.