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Comparison between the FBARs with different structures.
| Electrode Geometry | Crystal Orientation | Field Intensity (V/m) * | Electromechanical Coupling | Mean Allan Deviation |
|---|---|---|---|---|
| Coplanar (lateral excited) | Normal c-axis | 1.73 | 0.32% | 5.39 × 10−8 |
| Sandwiched (thickness excited) | Inclined c-axis | 6.67 | 0.68% | 1.61 × 10−8 |
* The applied voltage between the electrodes was 10 V for the calculation.
