Table 2.
The resonant frequencies and Q factors of the FBAR devices measured in air.
| Resonant Frequency (MHz) | Q Factor | |||
|---|---|---|---|---|
| Bare | Polyethylene-Coated | Bare | Polyethylene-Coated | |
| Shear mode | 1876.4 | 1868.3 | 276 | 263 |
| Longitudinal mode | 3163.3 | 3150.4 | 169 | 176 |
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