PIC	Photonic integrated circuit
MEMS	Micro-electromechanical systems
LTCC	Low Temperature Co-fired Ceramics
RF	Radio frequency
I/O	Input/Output
SEM	Scanning electron microscope
PECVD	Plasma-enhanced chemical vapor deposition
CTE	Coefficient of thermal expansion
WG	Waveguide
BD	Bridge design
NBD	Non-bridge design
IBA	Integrated bimorph actuator
SBA	Separate bimorph actuator