U11	U22	U33	U12	U13	U23
Cd1	0.02341 (18)	0.03144 (19)	0.0287 (2)	0.00034 (13)	0.00698 (13)	−0.00319 (14)
Co1	0.0266 (4)	0.0294 (4)	0.0262 (4)	0.0041 (3)	0.0058 (3)	−0.0003 (3)
Cl1	0.0484 (8)	0.0558 (9)	0.0347 (7)	0.0149 (7)	−0.0076 (6)	−0.0074 (6)
Cl2	0.0320 (6)	0.0434 (7)	0.0309 (6)	0.0019 (5)	0.0116 (5)	−0.0038 (5)
O11	0.0230 (16)	0.0268 (17)	0.038 (2)	−0.0002 (13)	0.0100 (14)	0.0007 (15)
C11	0.032 (3)	0.033 (3)	0.024 (3)	−0.002 (2)	0.009 (2)	0.004 (2)
C12	0.035 (3)	0.033 (3)	0.023 (2)	−0.004 (2)	0.006 (2)	0.001 (2)
O12	0.0344 (19)	0.0258 (18)	0.045 (2)	0.0039 (14)	0.0131 (16)	−0.0004 (16)
C121	0.051 (3)	0.035 (3)	0.052 (4)	0.013 (3)	0.018 (3)	0.005 (3)
C13	0.054 (3)	0.034 (3)	0.032 (3)	−0.006 (2)	0.013 (3)	−0.001 (2)
C14	0.053 (4)	0.048 (3)	0.029 (3)	−0.025 (3)	0.004 (2)	0.001 (2)
C15	0.037 (3)	0.060 (4)	0.030 (3)	−0.016 (3)	0.008 (2)	0.006 (3)
C16	0.030 (3)	0.045 (3)	0.027 (3)	−0.005 (2)	0.008 (2)	0.003 (2)
C161	0.016 (2)	0.065 (4)	0.037 (3)	0.002 (2)	0.008 (2)	0.004 (3)
N16	0.023 (2)	0.045 (3)	0.039 (3)	0.0044 (19)	0.0065 (18)	0.000 (2)
C162	0.029 (3)	0.050 (4)	0.071 (4)	0.013 (3)	0.012 (3)	−0.002 (3)
C21	0.027 (2)	0.039 (3)	0.039 (3)	0.007 (2)	0.012 (2)	−0.006 (2)
O21	0.0331 (19)	0.036 (2)	0.034 (2)	0.0036 (15)	0.0034 (15)	−0.0030 (16)
C22	0.038 (3)	0.031 (3)	0.041 (3)	0.002 (2)	0.013 (2)	−0.003 (2)
O22	0.047 (2)	0.036 (2)	0.038 (2)	0.0058 (17)	0.0084 (17)	0.0001 (17)
C221	0.052 (4)	0.042 (3)	0.048 (4)	0.011 (3)	0.017 (3)	0.007 (3)
C23	0.045 (3)	0.042 (3)	0.049 (4)	−0.003 (3)	0.016 (3)	−0.008 (3)
C24	0.044 (3)	0.045 (3)	0.043 (3)	−0.007 (3)	0.012 (3)	−0.013 (3)
C25	0.035 (3)	0.054 (4)	0.035 (3)	−0.001 (3)	0.007 (2)	−0.008 (3)
C26	0.030 (3)	0.045 (3)	0.034 (3)	0.004 (2)	0.011 (2)	−0.006 (2)
C261	0.030 (3)	0.051 (3)	0.026 (3)	0.004 (2)	0.011 (2)	−0.004 (2)
N26	0.031 (2)	0.042 (3)	0.025 (2)	0.0081 (18)	0.0093 (17)	0.0019 (19)
C262	0.047 (3)	0.047 (3)	0.036 (3)	−0.002 (3)	0.013 (2)	0.004 (3)
O31	0.0298 (17)	0.0287 (17)	0.0291 (18)	0.0003 (14)	0.0084 (14)	0.0012 (14)
C31	0.023 (2)	0.034 (3)	0.034 (3)	0.0031 (19)	0.011 (2)	−0.002 (2)
C32	0.029 (3)	0.034 (3)	0.035 (3)	0.002 (2)	0.008 (2)	0.004 (2)
O32	0.036 (2)	0.051 (2)	0.035 (2)	−0.0085 (17)	0.0009 (16)	0.0033 (18)
C321	0.045 (3)	0.065 (4)	0.043 (4)	−0.016 (3)	0.003 (3)	0.001 (3)
C33	0.033 (3)	0.038 (3)	0.049 (4)	0.000 (2)	0.008 (2)	0.000 (3)
C34	0.036 (3)	0.039 (3)	0.047 (3)	−0.002 (2)	0.008 (2)	0.011 (3)
C35	0.036 (3)	0.038 (3)	0.038 (3)	0.007 (2)	0.010 (2)	0.006 (2)
C36	0.032 (3)	0.032 (3)	0.033 (3)	0.006 (2)	0.011 (2)	0.003 (2)
C361	0.038 (3)	0.030 (3)	0.031 (3)	0.009 (2)	0.008 (2)	−0.001 (2)
N36	0.037 (2)	0.032 (2)	0.028 (2)	0.0012 (18)	0.0016 (18)	−0.0008 (18)
C362	0.046 (3)	0.043 (3)	0.031 (3)	−0.008 (3)	0.004 (2)	−0.004 (2)
O1	0.058 (3)	0.062 (3)	0.063 (3)	0.014 (2)	−0.004 (2)	−0.002 (3)