Fig. 2. Analytical results of the actual first three resonant modes and the finite element simulation results of the two FUC processes of release and pull-in.

a The cantilever and b the clamped-supported beam. The normalized time-domain output voltage after cantilever release is shown in (c), compared to that after pull-in shown in (d). Finite element simulation results for the release process are shown in terms of the (e) displacement, f normalized voltage waves, and g normalized voltage spectrum. For the pull-in process, the finite element simulation results are shown in terms of (h) displacement, i normalized voltage waves, and j normalized voltage spectrum