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. 2018 Aug 27;4:19. doi: 10.1038/s41378-018-0022-5

Fig. 2.

Fig. 2

a Sixty-four-element CMUT linear array mounted on PCB. b Six CMUT elements separated by a pitch of 550 μm. c CMUT cells showing interconnected top electrodes and cavities underneath, the optical transparency of SU-8 allows a visual identification of any possible defect