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XPS analysis of V 2p3/2 in a-VOx thin films
| Name | Oxidation state | Position (eV) | FWHM (eV) | At% |
|---|---|---|---|---|
| a-VOx-6 Pa | V5+ 2p3/2 | 517.31 | 1.21 | 68.35 |
| V4+ 2p3/2 | 516.20 | 1.98 | 31.65 | |
| a-VOx-13 Pa | V5+ 2p3/2 | 517.32 | 1.22 | 68.00 |
| V4+ 2p3/2 | 516.23 | 2.10 | 32.00 | |
| a-VOx-30 Pa | V5+ 2p3/2 | 517.31 | 1.21 | 63.65 |
| V4+ 2p3/2 | 516.27 | 2.08 | 36.35 |
