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. 2018 Nov 26;8:17376. doi: 10.1038/s41598-018-35604-z

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© The Author(s) 2018

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Schematic illustration of the mechanism related to the saturation of the ablation depth in fixed position and beam scanning. (a) Dimple with the shape of a paraboloid of revolution ablated by multiple laser pulses with a fixed beam position. (b) Groove with the shape of a parabolic cylinder ablated by a scanned laser beam (line scan trajectory). (c) Rectangular shaped cavity ablated by a scanned laser beam and parallel line hatching (bidirectional snake scan trajectory). The 3D Cartesian coordinate system x, y, and z denoted by red, green, and blue doted arrows given in (c) (right bottom corner) is general for all images (a–c). The centre positions of the focused Gaussian beam pulses are indicated by letters o. The multiple reflections of incident ray from the interior walls are depicted in side views (yz planes). The absorption of incident ray and multiply-reflected rays are also depicted in side views (yz planes). The increasingly reduced interior wall area interacting with focused Gaussian beams are depicted in top views (xy planes) and side views (yz planes) as laser-mater interaction area decreases from (a) to (b) and from (b) to (c).