Table 1.

Geometric parameters of the designed resonator.

Parameter	Description	Value (mm)
Ls	Substrate length	55
Ws	Substrate width	50
hs	Substrate height	5.626
Lf	CPW feedline length	20.2
Wf	CPW feedline width	2.31
Wcs	Width of the CPW slots	0.25
Wc	Cavity width	42
rvc	Radius of via of the cavity	0.4
svc	Space between two adjacent vias of the cavity	1.11
Wp	Capacitive post width	17
hp	Capacitive post height	3.372
rvp	Radius of via of the capacitive post	1
svp	Space between two adjacent vias of the capacitive post	7.3
d	Gap spacing between the capacitive post and top lid of the cavity	1.054