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Schematic of the fabrication process of the EFPI gas pressure sensor: (a,b) micromachining of capillary tube and SMF; (c) fusion splicing of drilled SMF to an intact SMF; (d) cleaving of the spliced structure; (e) fusing with capillary tube; (f) inserting and fusing of another SMF (LSMF) in the capillary tube.
