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. 2018 Nov 20;18(11):4042. doi: 10.3390/s18114042

Figure 2.

Figure 2

One of the first examples of an EGFET-based sensor realized in the 1980s. It is characterized by an aspect ratio of 1900/5 μm/μm, originally fabricated for an integrated ultrasonic transducer, resulting from a collaboration with the Center for Sensor Technologies, University of Pennsylvania (courtesy of Prof. J. Van der Spiegel) [14].