Table 1.

Sensor impedance properties with process variability for 95% interval of confidence.

Impedance Modulus				Impedance Phase
	min	mean	max		min	mean	max
Sensitivity $\left(\frac{M\Omega }{\%RH}\right)$	−3.184	−2.97	−2.756	Sensitivity $\left(\frac{°}{\%RH}\right)$	1.179	1.272	1.365
Zero shift$(\mathit{M}\mathbf{\Omega }$)	174.4	193.8	213.2	Zero shift $(°)$	−112	−111	−110