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Microfabrication process for PVAc-CNC intracortical probes. (a) PVAc-CNC film mounted to bare Si probe; (b) Parylene C deposition; (c) Ti/Au deposition; (d) Photoresist spin-coating and patterning; (e) Wet etching of Ti/Au films; (f) Second Parylene C deposition; (g) Parylene C patterned using oxygen plasma; (h) Laser micromachining the PVAc-CNC substrate; (i) Remove excess PVAc-CNC in field region; (j) Release probes.
