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Monolithic CMOS-micro-electro-mechanical systems (MEMS) gas sensors: (a) microhotplate array for carbon monoxide detection (from [108]) (b) microhotplate gas sensor with proportional-integral-derivative (PID) controllers (from [125]), (c) microhotplate gas sensor with mixed-signal architecture (from [125]), (d) microhotplate gas sensor using biased current measurement (from [126]).
