Table 1.
Performance summary of tri-axial multiple proof-mass accelerometers.
| Ref | Year | Author | Device Size (mm × mm) | Range (‘±g’) | Sensitivity X, Y, and Z | Nonlinearity X, Y, and Z | Cross-Axis Sensitivity X, Y, and Z | |
|---|---|---|---|---|---|---|---|---|
| [8] | 1999 | Lemkin, M. | 4 × 4 (including read out) | 1.9 | Digital Output (0.4 fF/bit) | 110, 160, 990 | - | - |
| [39] | 1999 | Matsumoto, Y. | 5 × 5 | - | 25 fF/g, 25 fF/g, 100 fF/g |
<10% | ||
| [41] | 2000 | Butefisch, S. | 9 × 9 | - | 210 mV/g | - | R2 = 0.997 | - |
| 990 mV/g | R2 = 0.99 | |||||||
| [43] | 2005 | Rodjegard, H. | 2.5 × 2 | - | 1.27 fF/g, 1.27 fF/g, 0.82 fF/g |
- | - | 0.12 fF/g |
| [44] | 2005 | Chae, J. | 7 × 9 | 1 | 6.8 pF/g, 6.8 pF/g, 2.9 pF/g |
1.6, 1.6, 1.08 | - | - |
| [47] | 2013 | Liu, Y.C. | 1.57 × 1.73 | 0.01~2 | 105 mV/g, 127 mV/g, 58 mV/g |
400, 210, 940 | 1%, 0.5%, 2.4% | 3%, 2.3%, 8.8% |
| [49] | 2015 | Tez, S. | 12 × 7 | 10 (X, Y) +12, −7 (Z) |
- | 5.4, 5.5, 12.6 | 0.34%, 0.28%, 0.41% | <1% |
| [50] | 2016 | Aydemir, A. | 11.8 × 4.8 | 4 | 70.2 mV/g, 70.4 mV/g, 21.6 mV/g |
13.9, 13.2, 17.8 | 0.26%, 0.28%, 0.3% | <1% |
| 71 (X, Y) 231 (Z) estimated |