Table 3.

Comparison of accelerometers.

Multiple Proof-Mass Accelerometers				Single Proof-Mass Accelerometers
Ref	Year	Sensitivity/Area (mV/mm2)	$\mathbf{Noise}\times \mathbf{Area}(\mathsf{\mu }\mathbf{g}{\mathbf{mm}}^2/\sqrt{\mathbf{H}\mathbf{z}})$	Ref	Year	Sensitivity/Area (mV/mm2)	$\mathbf{Noise}\times \mathbf{Area}(\mathsf{\mu }\mathbf{g}{\mathbf{mm}}^2/\sqrt{\mathbf{H}\mathbf{z}})$
[8]	1999	-	15,840	[10]	1997	0.0513	12,160
[39]	1999	3.42	-	[52]	2001	9.259	-
[41]	2000	2.59	-	[53]	2003	-	50
[43]	2005	0.56	-	[56]	2008	20	1760
[44]	2005	157	100	[57]	2009	18	4800
[47]	2013	21.35	2553	[58]	2010	0.06	1,131,118
[49]	2015	-	1058	[59]	2010	0.745	264
[50]	2016	0.381	1008	[60]	2012	91.25	336
-	-	-	-	[61]	2013	1.204	-
-	-	-	-	[62]	2014	24	6