Figure 2.

Single-crystal Si-on-insulator (SOI) comb-drive MEMS resonator characteristics. (a) Scanning electron microscopy (SEM) image. The inset shows a partial zoom-in view of the comb drive and fingers. Scale bar: 20 μm; (b) Simulated vibration pattern and mode shape for the first in-plane resonance mode; (c) Optically measured transmission data and frequency response around the first resonance as temperature increases; (d) Open-loop resonance frequency dependence on temperature for the extraction of TCf from the data in (c); (e) Electrically measured transmission and frequency response when various values of the DC polarization voltage are applied to the shuttle. The responses in (c,e) have not been converted to dimensionless transfer functions since the measurement path includes both electrical and optical components, which makes it difficult to derive absolute calibration factors.