Table 1.

The summary of the optimized design parameters for drive mode oscillator.

Parameters	Analytical Values
$m_1$	3.0036 × 10−7 kg
$m_2$	3.00 × 10−7 kg
$m_f$	7.9276 × 10−8 kg
$m_3$	2.3178 × 10−7 kg
$m_f+m_3$	3.1864 × 10−7 kg
$k_{chev}$	194.47 N·m−1
$k_{1x}=\frac{2Et{w}^3}{L_{1x}^3}$	30 N·m−1
$k_{2x}=\frac{2Et{w}^3}{L_{2x}^3}$	30 N·m−1
$k_{3x}=\frac{2Et{w}^3}{L_{3x}^3}$	70 N·m−1
$k_{12x}=\frac{2Et{w}^3}{L_{12x}^3}$	110 N·m−1
$k_{23x}=\frac{2Et{w}^3}{L_{23x}^3}$	50 N·m−1