Table 4.

Different parameter perturbations which could affect the robustness of the proposed gyroscope.

Parameter	Nominal Size (µm)	Expected Change (µm)
$w_{1x}$	8	±0.5
$w_{12x}$	8	±0.5
$w_{23x}$ .	8	±0.5
$w_{2x}$	8	±0.5
$w_{3x}$	8	±0.5
$L_{1x}$	526.6	±0.5
$L_{12x}$	271.1	±0.5
$L_{23x}$ .	352.6	±0.5
$L_{2x}$	526.6	±0.5
$L_{3x}$	397.1	±0.5