Table 6.

Comparison of the proposed gyroscope with multi-DOF microgyroscopes presented in the literature.

Reference	Actuation Method	Sensing Method	DOF	Size	Gain in Drive Mode	Mechanical Sensitivity/
Shakoor et al. [44]	Electro-thermal	Capacitive	2-DOF Drive and 1-DOF Sense Mode	2.2 × 2.6 mm2	0.9 nm	1.7 μm/°/s
Saleem et al. [17]	Electrostatic	Capacitive	2-DOF Drive and 1-DOF Sense Mode	2.4 × 1.6 mm2	0.2µm	$0.045 fF/rad/s$
Riaz et al. [10]	Electrostatic	Capacitive	2-DOF Drive and 1-DOF Sense Mode	2.2 × 2.6 mm2	0.3 µm	…
Acar et al. [45]	Electrostatic	Capacitive	2-DOF Drive and 2-DOF Sense Mode	…	5 µm	0.72 × 10−3 μm/°/s
This work	Electro-thermal	Capacitive	3-DOF Drive and 1-DOF Sense Mode	3.2 × 3 mm2	18.6 µm	$0.565 fF/rad/s$