U11	U22	U33	U12	U13	U23
O1	0.0239 (3)	0.0166 (3)	0.0187 (3)	0.0040 (3)	0.0045 (3)	0.0038 (2)
O2	0.0170 (3)	0.0173 (3)	0.0171 (3)	0.0021 (2)	−0.0019 (2)	0.0004 (2)
N1	0.0163 (3)	0.0111 (4)	0.0153 (3)	0.0012 (3)	0.0022 (3)	−0.0005 (3)
N2	0.0180 (3)	0.0121 (4)	0.0143 (3)	0.0011 (3)	0.0021 (3)	−0.0008 (3)
N3	0.0124 (3)	0.0133 (3)	0.0146 (3)	0.0022 (3)	0.0004 (3)	−0.0010 (3)
N4	0.0134 (3)	0.0157 (4)	0.0149 (3)	0.0026 (3)	0.0016 (3)	−0.0004 (3)
C1	0.0114 (4)	0.0139 (4)	0.0156 (4)	−0.0004 (3)	0.0006 (3)	−0.0006 (3)
C2	0.0157 (4)	0.0132 (4)	0.0198 (4)	−0.0015 (3)	0.0004 (3)	−0.0014 (3)
C3	0.0171 (4)	0.0145 (4)	0.0206 (4)	−0.0030 (3)	−0.0002 (3)	0.0024 (3)
C4	0.0173 (4)	0.0187 (5)	0.0169 (4)	−0.0025 (3)	0.0001 (3)	0.0022 (3)
C5	0.0158 (4)	0.0163 (4)	0.0162 (4)	−0.0006 (3)	0.0008 (3)	−0.0016 (3)
C6	0.0111 (4)	0.0116 (4)	0.0175 (4)	0.0000 (3)	0.0007 (3)	−0.0003 (3)
C7	0.0129 (4)	0.0142 (4)	0.0169 (4)	0.0016 (3)	0.0024 (3)	−0.0005 (3)
C8	0.0178 (4)	0.0159 (4)	0.0138 (4)	0.0052 (3)	0.0008 (3)	−0.0013 (3)
C9	0.0204 (4)	0.0202 (5)	0.0213 (4)	0.0016 (4)	0.0007 (3)	−0.0049 (4)
C10	0.0173 (4)	0.0237 (5)	0.0181 (4)	0.0029 (3)	0.0031 (3)	−0.0017 (4)
C11	0.0114 (4)	0.0116 (4)	0.0206 (4)	0.0004 (3)	0.0018 (3)	−0.0020 (3)
C12	0.0134 (4)	0.0107 (4)	0.0168 (4)	0.0002 (3)	−0.0003 (3)	0.0000 (3)
C13	0.0190 (4)	0.0146 (4)	0.0167 (4)	0.0006 (3)	0.0011 (3)	−0.0017 (3)
C14	0.0237 (5)	0.0180 (4)	0.0175 (4)	0.0007 (3)	−0.0030 (3)	0.0004 (3)
C15	0.0192 (4)	0.0198 (5)	0.0226 (4)	0.0039 (3)	−0.0039 (3)	0.0015 (4)
C16	0.0153 (4)	0.0186 (4)	0.0218 (4)	0.0035 (3)	0.0010 (3)	0.0002 (3)
C17	0.0142 (4)	0.0129 (4)	0.0160 (4)	−0.0002 (3)	0.0003 (3)	−0.0003 (3)
C18	0.0133 (4)	0.0108 (4)	0.0162 (4)	−0.0008 (3)	0.0012 (3)	−0.0011 (3)
C19	0.0181 (4)	0.0157 (4)	0.0163 (4)	0.0027 (3)	0.0044 (3)	0.0008 (3)
C20	0.0235 (5)	0.0256 (5)	0.0231 (4)	−0.0021 (4)	0.0070 (4)	−0.0083 (4)
C21	0.0180 (4)	0.0292 (5)	0.0230 (5)	0.0011 (4)	0.0053 (4)	0.0011 (4)