U11	U22	U33	U12	U13	U23
Cl1	0.02251 (14)	0.02897 (15)	0.02081 (14)	−0.00049 (8)	0.00027 (10)	0.00183 (8)
Cl2	0.03685 (16)	0.03457 (16)	0.02165 (15)	0.00812 (10)	0.00789 (11)	0.00275 (9)
O1	0.0284 (4)	0.0277 (4)	0.0345 (4)	−0.0009 (3)	−0.0007 (3)	0.0114 (3)
O2	0.0273 (4)	0.0226 (4)	0.0252 (4)	−0.0031 (3)	0.0014 (3)	0.0039 (3)
O3	0.0355 (4)	0.0356 (4)	0.0262 (4)	0.0082 (3)	0.0138 (3)	−0.0009 (3)
O4	0.0333 (4)	0.0350 (4)	0.0243 (4)	0.0124 (3)	0.0100 (3)	0.0016 (3)
O5	0.0319 (4)	0.0244 (4)	0.0230 (4)	0.0017 (3)	0.0071 (3)	0.0006 (3)
N1	0.0378 (6)	0.0468 (6)	0.0272 (5)	0.0224 (5)	0.0093 (4)	0.0057 (4)
N2	0.0336 (5)	0.0411 (5)	0.0240 (5)	0.0163 (4)	0.0106 (4)	0.0045 (4)
C1	0.0207 (4)	0.0220 (4)	0.0204 (4)	0.0018 (3)	0.0047 (3)	0.0012 (3)
C2	0.0192 (4)	0.0236 (5)	0.0178 (4)	0.0012 (3)	0.0029 (3)	0.0002 (3)
C3	0.0215 (4)	0.0221 (4)	0.0181 (4)	0.0003 (3)	0.0049 (3)	−0.0006 (3)
C4	0.0253 (5)	0.0233 (5)	0.0225 (5)	−0.0001 (4)	0.0083 (4)	−0.0004 (4)
C5	0.0260 (5)	0.0245 (5)	0.0213 (5)	0.0019 (4)	0.0070 (4)	0.0010 (4)
C6	0.0244 (5)	0.0231 (5)	0.0240 (5)	0.0016 (3)	0.0077 (4)	0.0002 (3)
C7	0.0239 (4)	0.0191 (4)	0.0246 (5)	−0.0005 (3)	0.0070 (4)	0.0021 (3)
C8	0.0254 (5)	0.0315 (5)	0.0275 (5)	0.0034 (4)	0.0100 (4)	−0.0007 (4)
C9	0.0346 (6)	0.0416 (6)	0.0240 (5)	0.0125 (5)	0.0127 (4)	0.0075 (4)