| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.0409 (4) | 0.1918 (13) | 0.1346 (10) | −0.0285 (6) | 0.0098 (5) | −0.0347 (9) |
| O1 | 0.0337 (7) | 0.0388 (7) | 0.0495 (9) | 0.0005 (6) | 0.0009 (6) | 0.0002 (6) |
| O2 | 0.0347 (7) | 0.0388 (7) | 0.0541 (9) | −0.0004 (6) | 0.0022 (6) | −0.0049 (6) |
| O3 | 0.0530 (10) | 0.0679 (12) | 0.0983 (15) | −0.0194 (10) | 0.0142 (10) | −0.0212 (11) |
| N1 | 0.0459 (10) | 0.0484 (11) | 0.0618 (12) | 0.0004 (9) | 0.0093 (9) | −0.0053 (9) |
| N2 | 0.0445 (10) | 0.0434 (10) | 0.0583 (12) | −0.0042 (8) | 0.0070 (8) | −0.0058 (8) |
| N3 | 0.0391 (9) | 0.0393 (9) | 0.0554 (11) | 0.0024 (8) | 0.0032 (8) | −0.0038 (8) |
| C1 | 0.0397 (12) | 0.0612 (15) | 0.0648 (15) | −0.0029 (11) | 0.0036 (11) | −0.0073 (12) |
| C2 | 0.0495 (15) | 0.085 (2) | 0.082 (2) | −0.0147 (14) | −0.0027 (14) | −0.0151 (17) |
| C3 | 0.0378 (13) | 0.112 (3) | 0.0733 (19) | −0.0085 (15) | 0.0046 (12) | −0.0051 (18) |
| C4 | 0.0419 (13) | 0.097 (2) | 0.083 (2) | 0.0130 (15) | 0.0095 (13) | −0.0038 (17) |
| C5 | 0.0491 (13) | 0.0675 (16) | 0.0708 (17) | 0.0051 (12) | 0.0107 (12) | −0.0023 (13) |
| C6 | 0.0377 (11) | 0.0514 (12) | 0.0495 (12) | 0.0033 (10) | 0.0006 (9) | 0.0048 (10) |
| C7 | 0.0389 (11) | 0.0408 (11) | 0.0453 (11) | 0.0062 (9) | 0.0024 (8) | 0.0030 (9) |
| C8 | 0.0394 (10) | 0.0375 (10) | 0.0407 (10) | −0.0029 (8) | −0.0008 (8) | 0.0062 (8) |
| C9 | 0.0372 (10) | 0.0380 (10) | 0.0433 (11) | −0.0016 (8) | 0.0000 (8) | 0.0017 (8) |
| C10 | 0.0357 (10) | 0.0328 (9) | 0.0349 (9) | 0.0008 (8) | −0.0011 (7) | 0.0032 (7) |
| C11 | 0.0414 (10) | 0.0306 (9) | 0.0407 (10) | 0.0013 (8) | −0.0034 (8) | −0.0029 (8) |
| C12 | 0.0356 (10) | 0.0363 (10) | 0.0458 (11) | −0.0044 (8) | −0.0033 (8) | −0.0015 (8) |
| C13 | 0.0344 (10) | 0.0338 (9) | 0.0385 (10) | 0.0017 (8) | −0.0009 (8) | 0.0034 (8) |
| C14 | 0.0430 (11) | 0.0306 (9) | 0.0393 (10) | 0.0014 (8) | −0.0002 (8) | −0.0023 (8) |
| C15 | 0.0376 (10) | 0.0329 (9) | 0.0423 (11) | −0.0061 (8) | −0.0027 (8) | −0.0011 (8) |
| C16 | 0.0398 (11) | 0.0518 (13) | 0.0529 (13) | −0.0011 (10) | 0.0007 (9) | 0.0055 (10) |
| C17 | 0.0422 (13) | 0.0750 (18) | 0.0729 (17) | 0.0050 (12) | 0.0125 (12) | 0.0086 (14) |