Figure 1.
Schematic of an ion beam assisted deposition system. Briefly, e-beam evaporated titanium is bombarded with nitrogen and argon ions to form a TiN thin film on substrates in a vacuum chamber.
Schematic of an ion beam assisted deposition system. Briefly, e-beam evaporated titanium is bombarded with nitrogen and argon ions to form a TiN thin film on substrates in a vacuum chamber.