Table 3.
Mean impedance of 30 μm TiN microelectrodes at 1 kHz before and after cell experiments performed in different cell culture media.
Before cell experiments | After cell experiments | |||||||
---|---|---|---|---|---|---|---|---|
MEA manufacturer | TiN type | Medium | AVG [kΩ] | Stdev [kΩ] | AVG [kΩ] | Stdev [kΩ] | Count of MEAs | Count of cell experiments** |
BMT | IBAD | NDM | 83 | 5 | 143 | 38 | 5 | 1 |
BMT | IBAD | BPH | 87 | 5 | 35* | 26* | 5 | 1 |
BMT | IBAD | none | 94 | 21 | 137 | 16 | 2 | 0 |
MCS | Sputtered | NDM | 46 | 32 | 114 | 86 | 5 | 2 |
MCS | Sputtered | BPH | 43 | 30 | 101 | 97 | 4 | 2 |
Unreliable result as the Si3N4 insulator layer was almost completely corroded.
Between impedance measurements.