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. 2018 Dec 13;18(12):4410. doi: 10.3390/s18124410

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© 2018 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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(a) Thickness profile (z direction) measured along a 900 μm path from the center of the In₂O₃ sample deposited on glass. (b) Thickness deviation from flat-film condition, estimated along three different profiles, 400 μm-long, within the same In₂O₃ 230 nm-thick film deposited on a glass substrate. For each of them, roughness is calculated as the average value of absolute deviation data.

(a) Thickness profile (z direction) measured along a 900 μm path from the center of the In₂O₃ sample deposited on glass. (b) Thickness deviation from flat-film condition, estimated along three different profiles, 400 μm-long, within the same In₂O₃ 230 nm-thick film deposited on a glass substrate. For each of them, roughness is calculated as the average value of absolute deviation data.