Figure 15.

Distribution of the charge density ρ (plot (a)), and of the voltage (plot (b)) inside the film as a function of z for different values of charged surface species density, N_s, and for two films thickness, 72 nm and 144 nm. N_s in the range 0.1 × 10¹¹ cm⁻²–6.3 × 10¹¹ cm⁻². (c) Surface voltage barrier as a function of the density of charged surface species. Solid lines: proposed model, dashed lines: fully depleted model. (d) Sensor responses to the variation of surface charge density. Data for In₂O₃ are taken from [28,29] N_d = 1.2 × 10¹⁷ cm⁻³.