Figure 16.

Distribution of the charge density, ρ (plot (a)) and of the voltage (plot (b)) inside the film as a function of z for different values of charged surface species density, N_s, for two films thickness, 72 nm and 144 nm. N_s in the range (0.3 × 10¹² cm⁻²–7.2 × 10¹² cm⁻²). (c) Surface voltage barrier as a function of the density of charged surface species. Solid lines: proposed model, dashed lines: fully depleted model. (d) Sensor responses to variation of surface charge density. Data for In₂O₃ are taken from [28,29] N_d = 3.6 × 10¹⁸ cm⁻³.