Figure 6.

(a) 1D steering of a microrobot with different deformation radii ($D_z$); (b) 2D steering of a flexible microrobot with different deformation directions of the end-effector (${\theta }_{yx}$); (c,d) the compression between the desired path and experimental results (${\theta }_r$ is 33° and ${\theta }_y$ varied between 0° and 360°); (e) 2D steering for different deformation radii $D_z$, for the circles (from 1 to 3.38 mm radius) ${\theta }_r$ is 15°, 23°, 33°, 46°, 65°, 105°, respectively, and ${\theta }_y$ is varied between 0° to 360°, (e) maximum deviation between the experimental and the desired position (f) average deviation between the experimental and the desired position.