Table A2.
t = 25 nm (rate = 15 A/s) | t = 50 nm (rate = 15 A/s) | ||||||||
---|---|---|---|---|---|---|---|---|---|
E (eV) | λ (nm) | ε′ | ε″ | n | k | ε′ | ε″ | n | k |
0.38 | 3298 | −456 | 99.5 | 2.32 | 21.5 | −502 | 97.3 | 2.16 | 22.5 |
0.45 | 2739 | −318 | 58.4 | 1.63 | 17.9 | −349 | 56.9 | 1.52 | 18.7 |
0.53 | 2343 | −233 | 37.1 | 1.21 | 15.3 | −255 | 36.0 | 1.12 | 16.0 |
0.61 | 2046 | −177 | 25.1 | 0.94 | 13.4 | −194 | 24.3 | 0.87 | 14.0 |
0.68 | 1816 | −139 | 17.7 | 0.75 | 11.8 | −152 | 17.2 | 0.70 | 12.3 |
0.76 | 1633 | −111 | 13.1 | 0.62 | 10.6 | −122 | 12.7 | 0.57 | 11.0 |
0.80 | 1550 | −99.7 | 11.3 | 0.57 | 10.0 | −109 | 10.9 | 0.52 | 10.5 |
0.84 | 1483 | −90.8 | 10.0 | 0.52 | 9.54 | −99.3 | 9.66 | 0.48 | 9.98 |
0.91 | 1359 | −75.2 | 7.87 | 0.45 | 8.68 | −82.3 | 7.60 | 0.42 | 9.08 |
0.95 | 1310 | −69.4 | 7.14 | 0.43 | 8.34 | −76.0 | 6.89 | 0.39 | 8.73 |
0.99 | 1253 | −63.0 | 6.35 | 0.40 | 7.94 | −69.0 | 6.13 | 0.37 | 8.31 |
1.07 | 1163 | −53.3 | 5.26 | 0.36 | 7.31 | −58.4 | 5.08 | 0.33 | 7.65 |
1.14 | 1085 | −45.5 | 4.46 | 0.33 | 6.75 | −49.9 | 4.30 | 0.30 | 7.07 |
1.16 | 1064 | −43.0 | 4.23 | 0.32 | 6.57 | −47.3 | 4.08 | 0.30 | 6.88 |
1.22 | 1017 | −39.0 | 3.87 | 0.31 | 6.26 | −42.9 | 3.73 | 0.28 | 6.56 |
1.30 | 957 | −33.7 | 3.43 | 0.29 | 5.81 | −37.1 | 3.31 | 0.27 | 6.10 |
1.37 | 903 | −29.2 | 3.10 | 0.29 | 5.41 | −32.2 | 3.00 | 0.26 | 5.68 |
1.45 | 856 | −25.4 | 2.87 | 0.28 | 5.04 | −28.1 | 2.77 | 0.26 | 5.31 |
1.53 | 813 | −22.1 | 2.71 | 0.29 | 4.71 | −24.5 | 2.61 | 0.26 | 4.96 |
1.59 | 780 | −19.7 | 2.62 | 0.29 | 4.45 | −21.9 | 2.53 | 0.27 | 4.69 |
1.60 | 774 | −19.2 | 2.61 | 0.30 | 4.39 | −21.4 | 2.52 | 0.27 | 4.64 |
1.68 | 738 | −16.8 | 2.56 | 0.31 | 4.11 | −18.8 | 2.47 | 0.28 | 4.34 |
1.76 | 706 | −14.6 | 2.56 | 0.33 | 3.83 | −16.4 | 2.48 | 0.31 | 4.06 |
1.83 | 677 | −12.6 | 2.62 | 0.37 | 3.58 | −14.3 | 2.52 | 0.33 | 3.80 |
1.91 | 649 | −10.9 | 2.72 | 0.41 | 3.33 | −12.4 | 2.62 | 0.37 | 3.55 |
1.96 | 633 | −9.71 | 2.84 | 0.45 | 3.15 | −11.1 | 2.74 | 0.41 | 3.36 |
1.99 | 624 | −9.37 | 2.89 | 0.47 | 3.10 | −10.8 | 2.78 | 0.42 | 3.31 |
2.06 | 601 | −8.00 | 3.13 | 0.54 | 2.88 | −9.26 | 3.00 | 0.49 | 3.08 |
2.14 | 580 | −6.78 | 3.45 | 0.64 | 2.68 | −7.92 | 3.31 | 0.58 | 2.87 |
2.22 | 560 | −5.74 | 3.88 | 0.77 | 2.52 | −6.76 | 3.71 | 0.69 | 2.69 |
2.29 | 541 | −4.95 | 4.39 | 0.91 | 2.40 | −5.81 | 4.21 | 0.83 | 2.55 |
2.33 | 532 | −4.60 | 4.71 | 1.00 | 2.36 | −5.35 | 4.56 | 0.92 | 2.49 |
2.37 | 523 | −4.46 | 4.91 | 1.04 | 2.35 | −5.14 | 4.79 | 0.97 | 2.47 |
2.45 | 507 | −4.25 | 5.31 | 1.13 | 2.35 | −4.80 | 5.33 | 1.09 | 2.45 |
2.52 | 492 | −4.23 | 5.45 | 1.16 | 2.36 | −4.74 | 5.66 | 1.15 | 2.46 |
2.60 | 477 | −4.17 | 5.32 | 1.14 | 2.34 | −4.79 | 5.67 | 1.15 | 2.47 |
2.68 | 463 | −3.96 | 5.08 | 1.11 | 2.28 | −4.73 | 5.44 | 1.11 | 2.44 |
2.75 | 450 | −3.63 | 4.84 | 1.10 | 2.20 | −4.50 | 5.13 | 1.08 | 2.38 |
2.83 | 438 | −3.22 | 4.70 | 1.11 | 2.11 | −4.14 | 4.87 | 1.06 | 2.29 |
2.91 | 427 | −2.82 | 4.64 | 1.14 | 2.03 | −3.73 | 4.70 | 1.07 | 2.21 |
2.98 | 416 | −2.45 | 4.65 | 1.19 | 1.96 | −3.32 | 4.62 | 1.09 | 2.12 |
3.06 | 405 | −2.14 | 4.72 | 1.23 | 1.91 | −2.96 | 4.61 | 1.12 | 2.05 |
3.14 | 395 | −1.89 | 4.82 | 1.28 | 1.88 | −2.65 | 4.65 | 1.16 | 2.00 |
3.21 | 386 | −1.70 | 4.94 | 1.33 | 1.86 | −2.40 | 4.71 | 1.20 | 1.96 |
3.29 | 377 | −1.58 | 5.06 | 1.36 | 1.85 | −2.22 | 4.79 | 1.24 | 1.94 |
3.37 | 368 | −1.52 | 5.17 | 1.39 | 1.86 | −2.09 | 4.87 | 1.27 | 1.92 |
3.44 | 360 | −1.52 | 5.26 | 1.41 | 1.87 | −2.02 | 4.93 | 1.29 | 1.92 |
3.52 | 352 | −1.57 | 5.31 | 1.41 | 1.88 | −2.00 | 4.96 | 1.29 | 1.92 |
3.60 | 345 | −1.65 | 5.32 | 1.40 | 1.90 | −2.02 | 4.97 | 1.29 | 1.92 |
3.67 | 338 | −1.75 | 5.30 | 1.38 | 1.92 | −2.06 | 4.94 | 1.28 | 1.93 |
3.75 | 331 | −1.87 | 5.23 | 1.36 | 1.93 | −2.12 | 4.88 | 1.26 | 1.93 |
3.83 | 324 | −1.99 | 5.11 | 1.32 | 1.93 | −2.18 | 4.76 | 1.24 | 1.93 |
3.90 | 318 | −2.10 | 4.95 | 1.28 | 1.93 | −2.24 | 4.63 | 1.20 | 1.92 |
3.98 | 312 | −2.20 | 4.77 | 1.24 | 1.93 | −2.29 | 4.46 | 1.17 | 1.91 |
4.06 | 306 | −2.26 | 4.55 | 1.19 | 1.92 | −2.32 | 4.27 | 1.13 | 1.90 |
4.13 | 300 | −2.32 | 4.33 | 1.14 | 1.90 | −2.34 | 4.07 | 1.08 | 1.88 |