Table 2.
Uncertainty Contributor | IM—COP | ICM—COP | IM—PMMA | ICM—PMMA |
---|---|---|---|---|
ucal,z (calibration artefact) | 0.26 µm | 0.26 µm | 0.26 µm | 0.26 µm |
up,z (instrument repeatability) | 0.03 µm | 0.03 µm | 0.03 µm | 0.03 µm |
ub,z (instrument thermal) | 0.00 µm | 0.00 µm | 0.00 µm | 0.00 µm |
uwp,z (part repeatability) | 0.13 µm | 0.13 µm | 0.11 µm | 0.11 µm |
uwt,z (part thermal) | 0.01 µm | 0.01 µm | 0.04 µm | 0.04 µm |
uform,z (form error) | 0.17 µm | 0.17 µm | 0.03 µm | 0.05 µm |
k (coverage factor) | 2 | 2 | 2 | 2 |
U (exp. Uncertainty) | 0.7 µm | 0.7 µm | 0.6 µm | 0.6 µm |