Table 6.
Factors | Max Warpage µm | Quadratic Regression Coefficient µm/mm2 | Factors | Max Warpage µm | Quadratic Regression Coefficient µm/mm2 |
---|---|---|---|---|---|
IM without holding; COP | 2.0 | −0.6 | ICM; 250 bar, 0.4 mm | 1.1 | 0.3 |
IM; COP | 0.7 | 0.2 | ICM; 250 bar, 1.0 mm | 2.0 | 0.4 |
ICM without holding; COP | 4.3 | 0.9 | ICM; 450 bar, 0.4 mm | 1.0 | 0.2 |
ICM; COP | 2.0 | 0.4 | ICM; 450 bar, 1.0 mm | 1.1 | 0.2 |
IM without holding; PMMA | 1.6 | 0.4 | |||
IM; PMMA | 1.9 | 0.5 | |||
ICM without holding; PMMA | 106.9 | 39.5 | |||
ICM; PMMA | 2.2 | 0.6 |