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. 2018 Dec 10;9(12):653. doi: 10.3390/mi9120653

Table 6.

Results summary of part warpage as the maximum absolute deviation in the evaluated area, and as a quadratic coefficient of regression of the evaluated residuals.

Factors Max Warpage µm Quadratic Regression Coefficient µm/mm2 Factors Max Warpage µm Quadratic Regression Coefficient µm/mm2
IM without holding; COP 2.0 −0.6 ICM; 250 bar, 0.4 mm 1.1 0.3
IM; COP 0.7 0.2 ICM; 250 bar, 1.0 mm 2.0 0.4
ICM without holding; COP 4.3 0.9 ICM; 450 bar, 0.4 mm 1.0 0.2
ICM; COP 2.0 0.4 ICM; 450 bar, 1.0 mm 1.1 0.2
IM without holding; PMMA 1.6 0.4
IM; PMMA 1.9 0.5
ICM without holding; PMMA 106.9 39.5
ICM; PMMA 2.2 0.6