Table 3.
The performance parameters of a-IGZO TFTs with Ta2O5 gate dielectric.
| Width (μm) | Vth (V) | Ion/Ioff | SS (V/dec) | µfet (cm2/V·s) |
|---|---|---|---|---|
| 500 | 0.48 | 7.1 × 105 | 0.14 | 12.1 |
| 1000 | 0.49 | 2.1 × 105 | 0.11 | 6.4 |
| 1500 | 0.50 | 1.6 × 106 | 0.10 | 4.7 |
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