. Author manuscript; available in PMC: 2019 Apr 1.

Published in final edited form as: J Micro Nanolithogr MEMS MOEMS. 2018 Apr 23;17(2):025501. doi: 10.1117/1.JMM.17.2.025501

Table 2.

Average reflectance for a variety of different antireflective layers.

Method	Average specular reflectance (%)
Matte layer nail polish with nitride	1
Black silicon⁸	5
Nano-island-etched silicon⁹	5
Laser-etched platinum¹¹	5
Dielectric layer stacks⁵	0.2
Carbon nanotubes¹⁹	0.01
Sol–gel⁷	1
Index alternated nanoparticles²⁰	0.03