Table I. Performance comparison with state-of-the-art EIS systems.
Reference | [2] | [9] | [3] | [30] | [8] | This work |
Topology | Resistive or SC TIA | TIA + Direct I/Q conversion | TIA + Direct I/Q conversion | SC TIA + Multiplying ADC | V/I sensing + Direct I/Q conversion | Lock-in + ΣΔ |
Technology | 0.18 μm | 0.5 μm | 0.35 μm | 0.13 μm | 0.13 μm | 0.18 μm |
Area (per Channel) | 0.02 mm2 | 0.06 mm2 | 0.01 mm2 | 0.06 mm2 | - mm2 | 0.1 mm2 |
Sensing Area | 0.16 ×0.12 mm2 | 3×3 mm2 (estimation) | 1×1 mm2 | 1.05×1.6 mm2 | 9 pixel groups of 0.128 mm2 | 4.5×2.4 mm2 |
No. of Electrodes | 5 × 10 | 100 (estimation) | 10 × 10 | 16 | 144 | 59,760 |
Electrode Pitch | 150 μm | >600 μma | 100 μm | 300 μm | 89.4/357.8 μma | 13.5 μm |
No. Channels | 50 | 100 | 100 | 16 | 144 | 32 |
Impedance Range | - | - | 100 Ω - 100 MΩ | ~GΩ | 10 kΩ – 1 GΩ | 1 kΩ – 10 GΩ |
Transduced Current Range | 0.1 nA – 250 μA | 78 fA – 100 nA | +/- 25 μA | Max. 400nA | - | 10 pA – 30 μA |
Frequency Range | 20 Hz | 1 mHz – 10 kHz | 10 Hz – 50 MHz | 0.1 Hz – 10 kHz | 500 kHz – 4 MHz | 1 Hz – 1 MHz |
Noise | 25 μVrms (1 Hz – 1 kHz) | - | 330 pArms (1 Hz – 10 Hz) 577 pArms (1 Hz – 1 kHz) | 320 fArms | - | 6.4 pArms (1 Hz – 100 kHz) |
DR | - | 122 dB | 97 dB | 140 dB | - | 102 dB |
Supply | 3.3 V | 3 V | 3.3 V | 1.2 V | 3.3 V | 3.3/1.8V |
Power (per Channel) | 2.7 mW | 6 μV | 736 μV | 42 μVb | - | 412 μWb |
Multiple Functions | - | - | - | - | Impedance, Voltage, optical | Impedance, Electrophysiology |
Equivalent square-shaped pixel dimension, for the same spatial density.
ADC included