Fig. 7. d 33 and d15 sensor array's response to light finger tapping and shearing and the study of sensor sensitivity. (a) Schematic of the finger tapping measurement, (b) d33 mode pressure sensor response with active single sensing line. (c) Schematic of the measurement circuit. (d) Voltage response of the d33 pressure sensor to light finger tapping (a reference voltage signal without touching, voltage response of sensor array 1, 2, 3 with light finger tapping and shearing). (e) Voltage response of d15 shear sensor to light finger shearing.
