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Entrance comparison of the micro-trepanning results, in which (a) corresponds to direct laser machining, while (b) represents the chemical-assisted method. The processing parameters include: P = 18.5 W, f = 0.4 MHz, v = 600 mm/s, n = 20, m = 120, and an NaOH solution with a concentration of one mol/L was employed in the chemical-assisted laser processing.
