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Exit details of the chemical-assisted micro-trepanning results, where (a) is an overall view, while (b) shows the details within the red square. The processing parameters include: P = 18.5 W, f = 0.4 MHz, v = 600 mm/s, n = 20, m = 120; and a NaOH solution with a concentration of one mol/L was used in the chemical-assisted laser processing.
