Table 4.
Summary of chemical-assisted laser trepanning results.
| Test No | P | f | v | n | m | Entrance Diameter (µm) | σ-Entrance (µm) | Exit Diameter (µm) | σ-Exit (µm) | Taper (°) | Note |
|---|---|---|---|---|---|---|---|---|---|---|---|
| L1 | 1 | 1 | 1 | 1 | 1 | 251.81 | 4.84 | 84.88 | 21.80 | 7.92 | Through |
| L2 | 1 | 2 | 2 | 2 | 2 | 249.22 | 5.88 | 71.81 | 19.31 | 8.41 | Through |
| L3 | 1 | 3 | 3 | 3 | 3 | 243.50 | 10.99 | 61.39 | 20.07 | 9.76 | Through |
| L4 | 1 | 4 | 4 | 4 | 4 | 234.41 | 12.67 | 57.39 | 19.18 | 8.92 | Through |
| L5 | 2 | 1 | 2 | 3 | 4 | 269.60 | 9.22 | 168.47 | 19.15 | 5.21 | Through |
| L6 | 2 | 2 | 1 | 4 | 3 | 275.18 | 9.00 | 151.15 | 21.88 | 5.90 | Through |
| L7 | 2 | 3 | 4 | 1 | 2 | 226.59 | 8.92 | 116.94 | 19.41 | 5.22 | Through |
| L8 | 2 | 4 | 3 | 2 | 1 | 232.18 | 7.37 | 115.92 | 23.52 | 5.53 | Through |
| L9 | 3 | 1 | 3 | 4 | 2 | 273.06 | 13.45 | 205.79 | 11.90 | 3.21 | Through |
| L10 | 3 | 2 | 4 | 3 | 1 | 236.45 | 9.58 | 137.47 | 14.32 | 4.72 | Through |
| L11 | 3 | 3 | 1 | 2 | 4 | 260.18 | 11.88 | 186.81 | 10.03 | 3.50 | Through |
| L12 | 3 | 4 | 2 | 1 | 3 | 230.90 | 7.05 | 83.79 | 22.85 | 6.99 | Through |
| L13 | 4 | 1 | 4 | 2 | 3 | 253.58 | 13.89 | 181.71 | 11.39 | 3.43 | Through |
| L14 | 4 | 2 | 3 | 1 | 4 | 251.51 | 8.67 | 176.34 | 15.43 | 3.58 | Through |
| L15 | 4 | 3 | 2 | 4 | 1 | 263.83 | 8.24 | 198.64 | 12.34 | 3.11 | Through |
| L16 | 4 | 4 | 1 | 3 | 2 | 260.41 | 7.33 | 211.06 | 9.04 | 2.36 | Through |
Note: σ-Entrance and σ-Exit represent the standard deviations of the entrance and exit diameters, respectively.