Table 4.
Characterization results of piezoelectric films over the S and L substrates.
| Pos | δ (μm) | Material | Size (mm2) | Layers | Porosity (%) | Ec (kV/cm) | A (mm2) | εr | Pr (µC/cm2) | d33 ± 1 (pm/V) | |
|---|---|---|---|---|---|---|---|---|---|---|---|
| L1 | A | 100 ± 2 | PZT/BiT | 10 × 10 | 10 | 16 | 20 ± 1 | 81 ± 1 | 566 ± 5 | 23.76 ± 0.01 | 148 |
| B | 100 ± 2 | 15 × 15 | 196 ± 2 | 410 ± 5 | 30.01 ± 0.01 | 135 | |||||
| L2 | A | 60 ± 1 | PZT/PZT | 10 × 10 | 10 | 16 | 50 ± 1.6 | 81 ± 1 | 298 ± 3 | 16.89 ± 0.01 | - |
| B | 60 ± 1 | 15 × 15 | 196 ± 2 | 154 ± 2 | 22.37 ± 0.01 | ||||||
| L3 | A | 50 ± 1 | PZT/PZT | 10 × 10 | 10 | 16 | 60 ± 2.2 | 81 ± 1 | 297 ± 3 | 12.74 ± 0.01 | 126 |
| B | 50 ± 1 | 15 × 15 | 196 ± 2 | 148 ± 2 | 10.25 ± 0.01 | 107 | |||||
| L4 | A | 100 ± 2 | PZT/BiT | 10 × 10 | 5 | 16 | 20 ± 1 | 81 ± 1 | 530 ± 5 | 21.55 ± 0.01 | - |
| B | 100 ± 2 | 15 × 15 | 196 ± 2 | 393 ± 5 | 27.17 ± 0.01 | ||||||
| L5 | A | 60 ± 1 | PZT/BiT | 10 × 10 | 5 | 12 | 20 ± 1.2 | 81 ± 1 | 198 ± 2 | 17.91 ± 0.01 | 95 |
| B | 60 ± 1 | 205 ± 2 | 20.52 ± 0.01 | 88 | |||||||
| L6 | A | 50 ± 1 | PZT/BiT | 10 × 10 | 10 | 12 | 24 ± 1.5 | 81 ± 1 | 193 ± 2 | - | - |
| B | 50 ± 1 | 191 ± 2 | |||||||||
| S1 | A | 22 ± 0.6 | BiT | 10 × 10 | 20 | 9 | 20.5 ± 2 | 81 ± 1 | 77 ± 1 | - | - |
| C | 22 ± 0.6 | 81 ± 1 | 82 ± 1 | ||||||||
| S2 | A | 50 ± 1 | PZT/BiT | 15 × 15 | 5 | 16 | 30 ± 1.4 | 196 ± 2 | 42 ± 1 | 5.35 ± 0.01 | 73 |
| C | 50 ± 1 | PZT/PZT | 15 × 15 | 30 ± 1.4 | 196 ± 2 | 146 ± 2 | 6.52 ± 0.01 | 105 | |||
| S3 | A | 50 ± 1 | PZT/BiT | 10 × 10 | 5 | 16 | 30 ± 1.4 | 81 ± 1 | 73 ± 1 | 7.74 ± 0.01 | 76 |
| C | 50 ± 1 | 81 ± 1 | 75 ± 1 | ||||||||
| S4 | A | 50 ± 1 | PZT/PZT | 10 × 10 | 5 | 18 | 30 ± 1.4 | 81 ± 1 | 100 ± 1 | 2.50 ± 0.01 | 80 |
| C | 50 ± 1 | 81 ± 1 | 112 ± 1 | ||||||||
| S5 | C | 1000 ± 20 | PZT Wafer | φ = 10 | 1000 | - | 3.5 ± 0.6 | 71 ± 1 | 3230 ± 15 | - | 410 |
| A | 1000 ± 20 | 71 ± 1 | 3103 ± 15 | 410 |