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Parameters of homogeneous and heterogeneous bonding for the ADCB test.
| Bonding conditions | Al-Al | PI-PI | Al-PI |
|---|---|---|---|
| Surface treatment | Ar-FAB bombardment20 for 30 s | Water-assisted VUV irradiation process18,19 at 2.8RH% for 5 min | E-VUV treatment for the predetermined exposures (see Fig. S2c) |
| Contact pressure (MPa) | ~2.07 | ~1.68 | ~4.00 |
| Contact area (mm2) | 400.0 | 400.0 | 100.0 |
| Temperature (°C) | 200 | 150 | 150 |
| Bonding time (min) | 10 | 10 | 10 |
