Skip to main content
. Author manuscript; available in PMC: 2019 Jan 29.
Published in final edited form as: Biomed Microdevices. 2017 Aug 8;19(3):71. doi: 10.1007/s10544-017-0212-1

Fig. 2.

Fig. 2

Fabrication Process. Illustration of the two-step photolithography protocol for the creation of a tiered, master mold of the Mμn system, including the use of two distinct photoresists, SU-8 2 and SU-8 2075, modified exposure and development steps, and PDMS molding and bonding